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MiCo

Parts Powder

MiCo ’s parts powder is the high-performance powder that can be customized according to customer requirements using various ceramic materials.

This high-performance parts powder demonstrates superior performance and special properties compared to conventional ceramic products, ensuring customer satisfaction and quality reliability through excellent durability, and plays a key role in advanced industries.

ceramic powder top 이미지

Characteristics of Parts Powder

Powder type Products (Material) Characteristics Application

Raw powder

Mg Spinel powder
(MgAl2O4)

Powder synthesized from magnesia and alumina
A compound with a spinel crystal structure that exhibits excellent corrosion resistance, wear resistance, and thermal shock resistance

Transparent Ceramic
Ceramic Parts

YAG powder
(Y3Al5O12)

Powder synthesized from yttria and alumina
A compound with a garnet crystal structure that exhibits unique optical properties and excellent mechanical properties and thermal shock resistance

Transparent Ceramic
Ceramic Parts

Granule powder

AlN granule powder

Aluminum nitride has the highest thermal conductivity among ceramic materials and exhibits excellent electrical resistance, thermal resistance, and corrosion resistance

Ceramic Heater, Parts

Al2O3 granule powder

Alumina is the most versatile material among ceramic materials, with high electrical insulation property, high hardness, and excellent wear resistance and chemical stability

Ceramic ESC, Parts

Y2O3 granule powder

Yttria is a representative plasma-resistant material and exhibits high electrical insulation property

Ceramic Parts

YAG granule powder
(Y3Al5O12)

Powder synthesized from yttria and alumina
A compound with a garnet crystal structure that exhibits unique optical properties and excellent mechanical properties and thermal shock resistance

Transparent Ceramic
Ceramic Parts

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MiCo Parts Powder

ceramic part 슬라이드 이미지

Mg Spinel Powder

  • High optical property
  • High strength & hardness
  • High thermal resistance
ceramic part 슬라이드 이미지

YAG Powder

  • Excellent plasma resistance
  • High optical property
  • Excellent corrosion resistance
ceramic part 슬라이드 이미지

AlN Powder

  • High thermal conductivity
  • High electrical resistivity
  • Low coefficient of thermal expansion
ceramic part 슬라이드 이미지

Al2O3 Powder

  • Excellent hardness
  • High wear resistance
  • High electrical resistivity
ceramic part 슬라이드 이미지

Y2O3 Powder

  • Excellent plasma resistance
  • High thermal shock resistance
  • High chemical stability
ceramic part 슬라이드 이미지

YAG Powder

  • Excellent plasma resistance
  • High optical property
  • Excellent corrosion resistance

Characteristics & Advantages of Parts Powder

Raw Powder

part ceramic 특징 이미지
part ceramic 특징 이미지

Mg Spinel Powder

  • · High optical property
  • · High strength & hardness
  • · High thermal resistance
part ceramic 특징 이미지
part ceramic 특징 이미지

YAG Powder

  • · Excellent plasma resistance
  • · High optical property
  • · Excellent corrosion resistance

Granule Powder

part ceramic 특징 이미지
part ceramic 특징 이미지

AlN Powder

  • · High thermal conductivity
  • · High electrical resistivity
  • · Low coefficient of thermal expansion
part ceramic 특징 이미지
part ceramic 특징 이미지

Al2O3 Powder

  • · Excellent hardness
  • · High wear resistance
  • · High electrical resistivity
part ceramic 특징 이미지
part ceramic 특징 이미지

Y2O3 Powder

  • · Excellent plasma resistance
  • · High thermal shock resistance
  • · High chemical stability
part ceramic 특징 이미지
part ceramic 특징 이미지

YAG Powder

  • · Excellent plasma resistance
  • · High optical property
  • · Excellent corrosion resistance

Application

ceramic process 이미지

Parts materials for semiconductor etching & deposition equipment

Etching process

part app 이미지
part app 이미지
part app 이미지

Deposition process

part app 이미지
part app 이미지
part app 이미지