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Main Business

We provide customers with a variety of ceramic materials such as Al2O3 (Alumina), Y2O3 (Yittria), and AlN (Aluminium nitride).
These ceramic materials are used in manufacturing and coating parts for Semi-Conductor equipment, parts for display equipment and cells for solid oxide fuel cell (SOFC) systems.

  • AIN Powder
    AIN Powder Raw
    AIN Powder Granule

    Excellent Thermal Conductivity

    Great Insulation Characteristics

    High Corrosion Resistance

  • Al2O3 Powder
    AI2 O3 Powder Raw
    AI2 O3 Powder Granule

    Excellent Hardness

    High Wear Resistance

    High Resistivity

  • Y2O3 Powder
    Y2O3 Powder Raw
    Y2O3 Powder Granule

    Excellent Heat Resistance

    High Dielectric Properties

    Chemical Stability

  • YAG Powder
    YAG Powder Raw
    YAG Powder Granule

    Excellent Plasma Erosion Resistance

    High Translucency

    Excellent Machinability

Coating Material
Method of Coating Types of Powder

APS (Atmospheric Plasma Spray)

- High Density Granule

- Overlip

AD (Aerosol Depostion)

- Powder

- Overlip

SPS (Suspension Plasma Spray)

- Slurry
(Water and NonWater System)

Parts Material for SemiConductor Equipment
Products Ingredients Material Characteristics

Heater Granule Powder

AIN

- High Temperature Volume resistance (≥109 Ω.cm)

- Excellent Thermal Conductivity Characteristics

ESC Granule Powder

Al2O3
Al2O3 Composite

- Excellent Dielectric Characteristics
(≥10 Dielectric Constant)

- High Volume resistance

Parts Granule Powder

Y2O3
Al2O3
Y2O3 Composite

- Excellent Powder Flowability

- Optimized Granule Properties

- Excellent plasma Erosion resistance